First Observation on the Feasibility of Scratch Formation by Pad-Particle Mixture in CMP Process

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@article{0a9e75bc7d8b47acb039404e882706d5,

title = "First Observation on the Feasibility of Scratch Formation by Pad-Particle Mixture in CMP Process",

author = "I.-H. Sung and H. Kim and Yeo, {Chang Dong}",

year = "2012",

month = jun,

language = "English",

pages = "8298–8306",

journal = "Applied Surface Science",

publisher = "Elsevier",

}