Using finite element analysis, the authors studied the steady current field distribution under the configuration of van der Pauw method [L. J. van der Pauw, Philips Tech. Rev. 20, 220 (1958)] for resistivity measurement in a diamond anvil cell. Based on the theoretical analysis, the authors obtained the theoretical accuracy curve of the van der Pauw method. This method provides accurate determination of sample resistivity when the ratio of sample thickness to its diameter is less than 0.45. They found that the contact area between electrode and sample is a key factor in the resistivity measurement accuracy and its size is dependent on the sample diameter for a given measurement accuracy.