| Original language | English |
|---|---|
| State | Published - 2009 |
Experimental Investigations on Flatness and Subsurface Damage in Lapping of Substrate Wafers: A Literature Review
Weilong Cong, Z.J. Pei, P.F. Zhang
Research output: Contribution to conference › Paper
Weilong Cong, Z.J. Pei, P.F. Zhang
Research output: Contribution to conference › Paper
| Original language | English |
|---|---|
| State | Published - 2009 |