@inproceedings{37ae6fc583ef4219962299a501ee0e07,
title = "Exergy analysis of atomic layer deposition for Al2O3 nano-film preparation",
abstract = "In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al2O3 thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al2O3 process and then exergy efficiency is calculated with a value of 2.72 ×10-5. According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al2O3 process. This research can be useful for future energy consumption and optimization of ALD system.",
keywords = "Atomic layer deposition, Exergy efficiency, Exergy loss",
author = "Fenfen Wang and Tao Li and Zhang, {Hong Chao} and Yuan, {Chris Y.}",
year = "2013",
doi = "10.1007/978-981-4451-48-2_47",
language = "English",
series = "Re-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering",
publisher = "Springer Berlin Heidelberg",
pages = "285--290",
editor = "Nee, {Andrew Y.C.} and Bin Song and Soh-Khim Ong",
booktitle = "Re-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering",
note = "20th CIRP International Conference on Life Cycle Engineering, LCE 2013 ; Conference date: 17-04-2013 Through 19-04-2013",
}