Exergy analysis of atomic layer deposition for Al2O3 nano-film preparation

Fenfen Wang, Tao Li, Hong Chao Zhang, Chris Y. Yuan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al2O3 thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al2O3 process and then exergy efficiency is calculated with a value of 2.72 ×10-5. According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al2O3 process. This research can be useful for future energy consumption and optimization of ALD system.

Original languageEnglish
Title of host publicationRe-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering
EditorsAndrew Y.C. Nee, Bin Song, Soh-Khim Ong
PublisherSpringer Berlin Heidelberg
Pages285-290
Number of pages6
ISBN (Electronic)9789814451475
DOIs
StatePublished - 2013
Event20th CIRP International Conference on Life Cycle Engineering, LCE 2013 - Singapore, Singapore
Duration: Apr 17 2013Apr 19 2013

Publication series

NameRe-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering

Conference

Conference20th CIRP International Conference on Life Cycle Engineering, LCE 2013
CountrySingapore
CitySingapore
Period04/17/1304/19/13

Keywords

  • Atomic layer deposition
  • Exergy efficiency
  • Exergy loss

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    Wang, F., Li, T., Zhang, H. C., & Yuan, C. Y. (2013). Exergy analysis of atomic layer deposition for Al2O3 nano-film preparation. In A. Y. C. Nee, B. Song, & S-K. Ong (Eds.), Re-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering (pp. 285-290). (Re-Engineering Manufacturing for Sustainability - Proceedings of the 20th CIRP International Conference on Life Cycle Engineering). Springer Berlin Heidelberg. https://doi.org/10.1007/978-981-4451-48-2_47