Original language | English |
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State | Published - May 2013 |
Exergy Analysis of Atomic Layer Deposition for Al2O3 Nano-film Preparation
FenFen Wang, Tao Li, Hong-Chao Zhang, Chris Yuan
Research output: Contribution to conference › Paper › peer-review
FenFen Wang, Tao Li, Hong-Chao Zhang, Chris Yuan
Research output: Contribution to conference › Paper › peer-review
Original language | English |
---|---|
State | Published - May 2013 |