Abstract
The power enhancement by a factor of about 2.5 for 333 nm III-nitride Ultraviolet (UV) Light Emitting Diodes (LED) using two dimensional photonic crystal (PC) was discussed. Triangular arrays of the PCs with different diameters were patterned using electron beam lithography and inductively coupled plasma dry etching. It was observed that the optical enhancement factor depends on the lattice constant and hole size of the PCs. The results show that the PC-LED mesa design aimed at separating the light generation and extraction area.
Original language | English |
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Pages (from-to) | 142-144 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 85 |
Issue number | 1 |
DOIs | |
State | Published - Jul 5 2004 |