Effects of Diffused Hydrogen Atoms on Thermomechanical Properties and Contact Behavior of DLC Film

Benjamin Dankesreiter, Shahriar Rahman, Jingan Song, Chang Dong Yeo

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)025303
JournalJournal of Applied Physics
StatePublished - Jul 2021

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