TY - JOUR
T1 - Effect of mass spectrometric sampling interface on the fundamental parameters of an inductively coupled plasma as a function of its operating conditions - Part II. Central-gas flow rate and sampling depth
AU - Gamez Goytia, Gerardo
AU - Lehn, Scott A.
AU - Huang, Mao
AU - Hieftje, Gary M.
PY - 2007/4
Y1 - 2007/4
N2 - The fundamental parameters of an inductively coupled plasma (ICP) were
measured by means of Thomson and Rayleigh scattering to study the
changes induced by the presence of a mass spectrometer (MS) sampling
cone. The electron number density (n(e)), electron temperature (T-e),
and gas-kinetic temperature (T-g) upstream from the mass spectrometer
sampler were followed while the central-gas flow rate and MS interface
sampling depth were varied. The gas-kinetic temperature was found to
decline at greater central-gas flow rates, an effect that was elevated
in the presence of the MS interface. As the MS interface was brought
closer to the ICP load coil, decreases in upstream plasma T-g ensued.
Overall, changes in the upstream fundamental parameters caused by the
presence of the MS interface were found to depend on operating
conditions. (c) 2007 Elsevier B.V. All rights reserved.
AB - The fundamental parameters of an inductively coupled plasma (ICP) were
measured by means of Thomson and Rayleigh scattering to study the
changes induced by the presence of a mass spectrometer (MS) sampling
cone. The electron number density (n(e)), electron temperature (T-e),
and gas-kinetic temperature (T-g) upstream from the mass spectrometer
sampler were followed while the central-gas flow rate and MS interface
sampling depth were varied. The gas-kinetic temperature was found to
decline at greater central-gas flow rates, an effect that was elevated
in the presence of the MS interface. As the MS interface was brought
closer to the ICP load coil, decreases in upstream plasma T-g ensued.
Overall, changes in the upstream fundamental parameters caused by the
presence of the MS interface were found to depend on operating
conditions. (c) 2007 Elsevier B.V. All rights reserved.
M3 - Article
SP - 370
EP - 377
JO - SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
JF - SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
SN - 0584-8547
ER -