Original language | English |
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Pages (from-to) | 061514 |
Journal | J. Vac. Sci. Technol. |
DOIs | |
State | Published - Oct 2013 |
Dry etching techniques for active devices based on hexagonal boron nitride epilayers
Sam Grenadier, Jing Li, Jingyu Lin, Hongxing Jiang
Research output: Contribution to journal › Article › peer-review