Dry etching techniques for active devices based on hexagonal boron nitride epilayers

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@article{6ff4049ebd2f43e9bc81c79ca1ba99cb,

title = "Dry etching techniques for active devices based on hexagonal boron nitride epilayers",

author = "Sam Grenadier and Jing Li and Jingyu Lin and Hongxing Jiang",

year = "2013",

month = oct,

doi = "10.1116/1.4826363",

language = "English",

pages = "061514",

journal = "J. Vac. Sci. Technol.",

}