TY - JOUR
T1 - Development and testing of a multilevel chevron actuator-based positioning system
AU - Oak, Sahil
AU - Rawool, Sandesh
AU - Sivakumar, Ganapathy
AU - Hendriske, Egbert J.
AU - Buscarello, Daniel
AU - Dallas, Tim
N1 - Funding Information:
Manuscript received May 18, 2011; revised July 27, 2011; accepted August 6, 2011. Date of publication October 6, 2011; date of current version December 2, 2011. This work was supported by the Welch Foundation (D-1651) and by the National Science Foundation (EEC-0648761, DUE-0837521, IIP-1014222). Subject Editor Y. B. Gianchandani.
PY - 2011/12
Y1 - 2011/12
N2 - We present the design, fabrication, and testing of a microscale positioning system. The system was designed in the SUMMiT V process to produce in-plane, bidirectional, micrometer-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the bidirectional actuation. The device has a smaller footprint and fewer electrical connections compared to similar devices, without compromising performance. Moreover, this device is capable of generating more force compared to previous devices. A LabVIEW-based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼ 180 μm with a step size of 9 μm.
AB - We present the design, fabrication, and testing of a microscale positioning system. The system was designed in the SUMMiT V process to produce in-plane, bidirectional, micrometer-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the bidirectional actuation. The device has a smaller footprint and fewer electrical connections compared to similar devices, without compromising performance. Moreover, this device is capable of generating more force compared to previous devices. A LabVIEW-based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼ 180 μm with a step size of 9 μm.
KW - Bent-beam actuators
KW - SUMMiT V
KW - buckling
KW - electro-thermal
KW - micro-actuators
KW - micro-positioning
KW - microelectromechanical systems (MEMS)
KW - polysilicon
UR - http://www.scopus.com/inward/record.url?scp=82455192200&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2011.2167674
DO - 10.1109/JMEMS.2011.2167674
M3 - Article
AN - SCOPUS:82455192200
SN - 1057-7157
VL - 20
SP - 1298
EP - 1309
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 6
M1 - 6035947
ER -