Development and testing of a multilevel chevron actuator-based positioning system

Sahil Oak, Sandesh Rawool, Ganapathy Sivakumar, Egbert J. Hendriske, Daniel Buscarello, Tim Dallas

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

We present the design, fabrication, and testing of a microscale positioning system. The system was designed in the SUMMiT V process to produce in-plane, bidirectional, micrometer-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the bidirectional actuation. The device has a smaller footprint and fewer electrical connections compared to similar devices, without compromising performance. Moreover, this device is capable of generating more force compared to previous devices. A LabVIEW-based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼ 180 μm with a step size of 9 μm.

Original languageEnglish
Article number6035947
Pages (from-to)1298-1309
Number of pages12
JournalJournal of Microelectromechanical Systems
Volume20
Issue number6
DOIs
StatePublished - Dec 2011

Keywords

  • Bent-beam actuators
  • SUMMiT V
  • buckling
  • electro-thermal
  • micro-actuators
  • micro-positioning
  • microelectromechanical systems (MEMS)
  • polysilicon

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