Original language | English |
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Pages (from-to) | 1298-1309 |
Journal | J. of Microelectromechanical Systems |
State | Published - 2011 |
Development and Testing of a Multi-Level Chevron Actuator Based Positioning System
Sahil Oak, Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothama, Timothy Dallas
Research output: Contribution to journal › Article › peer-review