Development and Testing of a Multi-Level Chevron Actuator Based Positioning System

Sahil Oak, Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothama, Timothy Dallas

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1298-1309
JournalJ. of Microelectromechanical Systems
StatePublished - 2011

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