Development and testing of a multi-level chevron actuator based positioning system

Sandesh Rawool; Ganapathy Sivakumar; Johan Hendriske; Daniel Buscarello; Immanuel Purushothaman; Tim E. Dallas

doi:10.1117/12.842270

Development and testing of a multi-level chevron actuator based positioning system

Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothaman, Tim E. Dallas

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V™ processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼180μm.

Original language	English
Title of host publication	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
DOIs	https://doi.org/10.1117/12.842270
State	Published - 2010
Event	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 26 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7592
ISSN (Print)	0277-786X

Conference

Conference	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Country	United States
City	San Francisco, CA
Period	01/25/10 → 01/26/10

Keywords

Electro-thermal
Micro-actuators
Micro-positioning

Access to Document

10.1117/12.842270

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Rawool, S., Sivakumar, G., Hendriske, J., Buscarello, D., Purushothaman, I., & Dallas, T. E. (2010). Development and testing of a multi-level chevron actuator based positioning system. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX [75920Q] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7592). https://doi.org/10.1117/12.842270

Rawool, Sandesh ; Sivakumar, Ganapathy ; Hendriske, Johan ; Buscarello, Daniel ; Purushothaman, Immanuel ; Dallas, Tim E. / Development and testing of a multi-level chevron actuator based positioning system. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. 2010. (Proceedings of SPIE - The International Society for Optical Engineering).

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abstract = "We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V{\texttrademark} processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼180μm.",

keywords = "Electro-thermal, Micro-actuators, Micro-positioning",

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Rawool, S, Sivakumar, G, Hendriske, J, Buscarello, D, Purushothaman, I & Dallas, TE 2010, Development and testing of a multi-level chevron actuator based positioning system. in Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX., 75920Q, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, San Francisco, CA, United States, 01/25/10. https://doi.org/10.1117/12.842270

Development and testing of a multi-level chevron actuator based positioning system. / Rawool, Sandesh; Sivakumar, Ganapathy; Hendriske, Johan; Buscarello, Daniel; Purushothaman, Immanuel; Dallas, Tim E.

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. 2010. 75920Q (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7592).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V™ processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼180μm.

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Rawool S, Sivakumar G, Hendriske J, Buscarello D, Purushothaman I, Dallas TE. Development and testing of a multi-level chevron actuator based positioning system. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. 2010. 75920Q. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.842270