Development and testing of a multi-level chevron actuator based positioning system

Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothaman, Tim E. Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V™ processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼180μm.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
DOIs
StatePublished - 2010
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - San Francisco, CA, United States
Duration: Jan 25 2010Jan 26 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7592
ISSN (Print)0277-786X

Conference

ConferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
CountryUnited States
CitySan Francisco, CA
Period01/25/1001/26/10

Keywords

  • Electro-thermal
  • Micro-actuators
  • Micro-positioning

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