@inproceedings{f1e2396c0dc14511a3866f9e0c42820f,
title = "Development and testing of a multi-level chevron actuator based positioning system",
abstract = "We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V{\texttrademark} processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ∼180μm.",
keywords = "Electro-thermal, Micro-actuators, Micro-positioning",
author = "Sandesh Rawool and Ganapathy Sivakumar and Johan Hendriske and Daniel Buscarello and Immanuel Purushothaman and Dallas, {Tim E.}",
year = "2010",
doi = "10.1117/12.842270",
language = "English",
isbn = "9780819479884",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX",
note = "null ; Conference date: 25-01-2010 Through 26-01-2010",
}