Design and simulation of aluminum bi-functional spatial light modulator

Xiong Xingguo, Tim Dallas, Shubhra Gangopadhyay, Jordan Berg, Temkin Henryk

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

In this paper, a bi-functional Aluminum MEMS spatial light modulator (micromirror) device design is introduced. The bi-functional mirror can work in both torsional and piston modes, depending on the voltage applied to the bottom driving electrodes. The mirror was fabricated with thick photoresist sacrificial layer technique. The working principle and performance of the micromirror aer analyzed. Based upon the analysis, an optimized micromirror design is proposed. The mirror can deflect for a maximum displacement of 1.3μm in its piston mode, and rotate for a maximum angle of 3.1° in its torsional mode. The micromirror can be used to modulate the phase as well as the direction of the incident light due to its bi-functional modes.

Original languageEnglish
Title of host publication2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005
Pages159-162
Number of pages4
DOIs
StatePublished - Dec 1 2005
Event2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005 - Cincinnati, OH, United States
Duration: Aug 7 2005Aug 10 2005

Publication series

NameMidwest Symposium on Circuits and Systems
Volume2005
ISSN (Print)1548-3746

Conference

Conference2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005
CountryUnited States
CityCincinnati, OH
Period08/7/0508/10/05

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Keywords

  • MEMS
  • Micromirror (SLM)
  • Piston mirror
  • Spatial light modulator
  • Torsional mirror

Cite this

Xingguo, X., Dallas, T., Gangopadhyay, S., Berg, J., & Henryk, T. (2005). Design and simulation of aluminum bi-functional spatial light modulator. In 2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005 (pp. 159-162). [1594063] (Midwest Symposium on Circuits and Systems; Vol. 2005). https://doi.org/10.1109/MWSCAS.2005.1594063