Design and Analysis of a Dual-Mode MEMS Micromirror

Xingguo Xiong, Timothy Dallas, S Gangopadhyay, Jordan Berg, H Temkin

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)23-31
JournalJournal of Micro and Nanosystems
StatePublished - Mar 2010

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    Xiong, X., Dallas, T., Gangopadhyay, S., Berg, J., & Temkin, H. (2010). Design and Analysis of a Dual-Mode MEMS Micromirror. Journal of Micro and Nanosystems, 23-31.