Design and Analysis of a Dual-Mode MEMS Micromirror

Xingguo Xiong, Timothy Dallas, S Gangopadhyay, Jordan Berg, H Temkin

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)23-31
JournalJournal of Micro and Nanosystems
StatePublished - Mar 2010

Fingerprint

Dive into the research topics of 'Design and Analysis of a Dual-Mode MEMS Micromirror'. Together they form a unique fingerprint.

Cite this