Cantilevers are useful as sensor devices with high sensitivity and have shown great promise for dense, multianalyte arrays. One of the difficulties has been the fabrication of multianalyte arrays that are capable of the simultaneous detection of a wide range of chemical and biological species. Functionalization procedures for one class of analytes are often incompatible with other classes and cross contamination is a significant concern when ink-jet deposition processes are used. In this study, we used surface micromachined cantilevers designed and fabricated using Sandia National Laboratories SUMMiT V MEMS process. The cantilevers are fabricated with a base that can be detached from the parent substrate after functionalization and mounted into a daughter array. We have utilized an IBM-fabricated 8-cantilever array chip as our daughter substrate due to its compatibility with a Scentris 8-cantilever readout system. Our initial work demonstrates that this is a feasible procedure for decoupling functionalization from array assembly.
- Sensor arrays