Chemical reaction thermodynamic model of low pressure CVD for Nano-TiO 2 film preparation

Tao Li, Junfeng Yang, Hong Chao Zhang, Chris Yuan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

With its unique and perfect performance, Nano-TiO 2 film has been widely used in many fields. However, the preparation of Nano-TiO 2 film has significant sustainability issues including heavy use of energy and materials, low production efficiency, toxic chemical emissions, etc. In this research, case study is conducted on a Low Pressure Chemical Vapor Deposition (LPCVD) process for nano-TiO 2 film preparation. For studying chemical reaction energy consumption of LPCVD process, film preparation techniques, chemical engineering thermodynamics and the law of thermodynamics are used to establish parametric thermodynamic model with such thermodynamic metrics as enthalpy change, entropy change and effective energy change. The heat production rate of chemical reaction has been obtained based on reaction rate function and thermodynamic model. Setting certain chemical reaction condition, the corresponding thermodynamic values of Nano-TiO 2 film preparation are calculated. At the same time, the energy utilization and material utilization are obtained. To validate the results, the LPCVD process is simulated with Fluent software. The calculated results are compared with the simulation results and are validated. The research can be the basis theory of processes and equipment energy optimization for Nano-TiO 2 film preparation.

Original languageEnglish
Title of host publication2012 IEEE International Symposium on Sustainable Systems and Technology, ISSST 2012
DOIs
StatePublished - 2012
Event2012 IEEE International Symposium on Sustainable Systems and Technology, ISSST 2012 - Boston, MA, United States
Duration: May 16 2012May 18 2012

Publication series

NameIEEE International Symposium on Sustainable Systems and Technology
ISSN (Print)2157-524X
ISSN (Electronic)2157-5258

Conference

Conference2012 IEEE International Symposium on Sustainable Systems and Technology, ISSST 2012
CountryUnited States
CityBoston, MA
Period05/16/1205/18/12

Keywords

  • Energy efficiency
  • Low Pressure Chemical Vapor Deposition
  • Nano-TiO film
  • Thermodynamic model

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    Li, T., Yang, J., Zhang, H. C., & Yuan, C. (2012). Chemical reaction thermodynamic model of low pressure CVD for Nano-TiO 2 film preparation. In 2012 IEEE International Symposium on Sustainable Systems and Technology, ISSST 2012 [6228023] (IEEE International Symposium on Sustainable Systems and Technology). https://doi.org/10.1109/ISSST.2012.6228023