Characterization of Si3N4/Si(111) thin films by reflectance difference spectroscopy

Luis-Felipe 1. Lastras-Martinez, Nicolás Antonio Ulloa-Castillo, Rafael Herrera-Jasso, Raúl Eduardo Balderas-Navarro, Alfonso Lastras-Martínez, Mahesh Pandikunta, Oleg Ledyaev, Vladimir V Kuryatkov, Sergey Nikishin

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)021501
JournalDefault journal
StatePublished - Jan 2015

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    Lastras-Martinez, L-F. ., Ulloa-Castillo, N. A., Herrera-Jasso, R., Balderas-Navarro, R. E., Lastras-Martínez, A., Pandikunta, M., Ledyaev, O., Kuryatkov, V. V., & Nikishin, S. (2015). Characterization of Si3N4/Si(111) thin films by reflectance difference spectroscopy. Default journal, 021501.