Characterization of a nanocoating using a MEMS tribogauge

Ashwin Vijayasai, Gautham Ramachandran, Ganapathy Sivakumar, Charlie Anderson, Richard Gale, Tim Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
DOIs
StatePublished - 2012
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - San Francisco, CA, United States
Duration: Jan 23 2012Jan 24 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8250
ISSN (Print)0277-786X

Conference

ConferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
CountryUnited States
CitySan Francisco, CA
Period01/23/1201/24/12

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  • Cite this

    Vijayasai, A., Ramachandran, G., Sivakumar, G., Anderson, C., Gale, R., & Dallas, T. (2012). Characterization of a nanocoating using a MEMS tribogauge. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI [82500C] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8250). https://doi.org/10.1117/12.909335