Characterization of a nanocoating using a MEMS tribogauge

Ashwin Vijayasai; Gautham Ramachandran; Ganapathy Sivakumar; Charlie Anderson; Richard Gale; Tim Dallas

doi:10.1117/12.909335

Characterization of a nanocoating using a MEMS tribogauge

Ashwin Vijayasai, Gautham Ramachandran, Ganapathy Sivakumar, Charlie Anderson, Richard Gale, Tim Dallas

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

Original language	English
Title of host publication	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
DOIs	https://doi.org/10.1117/12.909335
State	Published - 2012
Event	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - San Francisco, CA, United States Duration: Jan 23 2012 → Jan 24 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8250
ISSN (Print)	0277-786X

Conference

Conference	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
Country/Territory	United States
City	San Francisco, CA
Period	01/23/12 → 01/24/12

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10.1117/12.909335

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Vijayasai, A., Ramachandran, G., Sivakumar, G., Anderson, C., Gale, R., & Dallas, T. (2012). Characterization of a nanocoating using a MEMS tribogauge. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI Article 82500C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8250). https://doi.org/10.1117/12.909335

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title = "Characterization of a nanocoating using a MEMS tribogauge",

abstract = "A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.",

author = "Ashwin Vijayasai and Gautham Ramachandran and Ganapathy Sivakumar and Charlie Anderson and Richard Gale and Tim Dallas",

year = "2012",

doi = "10.1117/12.909335",

language = "English",

isbn = "9780819488930",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI",

note = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI ; Conference date: 23-01-2012 Through 24-01-2012",

}

Vijayasai, A, Ramachandran, G, Sivakumar, G, Anderson, C, Gale, R & Dallas, T 2012, Characterization of a nanocoating using a MEMS tribogauge. in Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI., 82500C, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, United States, 01/23/12. https://doi.org/10.1117/12.909335

Characterization of a nanocoating using a MEMS tribogauge. / Vijayasai, Ashwin; Ramachandran, Gautham; Sivakumar, Ganapathy et al.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI. 2012. 82500C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8250).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Gale, Richard

AU - Dallas, Tim

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Y1 - 2012

N2 - A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

AB - A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

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M3 - Conference contribution

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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Y2 - 23 January 2012 through 24 January 2012

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Characterization of a nanocoating using a MEMS tribogauge

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