Chapter 4 SiGe/Si processing

D. Y.C. Lie, K. L. Wang

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

5 Scopus citations

Original language	English
Title of host publication	Semiconductors and Semimetals
Publisher	Academic Press Inc.
Pages	151-197
Number of pages	47
Edition	C
DOIs	https://doi.org/10.1016/S0080-8784(01)80214-3
State	Published - 2001

Name	Semiconductors and Semimetals
Number	C
Volume	73
ISSN (Print)	0080-8784

Access to Document

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AU - Lie, D. Y.C.

AU - Wang, K. L.

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BT - Semiconductors and Semimetals

PB - Academic Press Inc.

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