Chapter 4 SiGe/Si processing

D. Y.C. Lie, K. L. Wang

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

4 Scopus citations
Original languageEnglish
Title of host publicationSemiconductors and Semimetals
PublisherAcademic Press Inc.
Pages151-197
Number of pages47
EditionC
DOIs
StatePublished - 2001

Publication series

NameSemiconductors and Semimetals
NumberC
Volume73
ISSN (Print)0080-8784

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