Calibration of AFM cantilever spring constants

Christopher T. Gibson, Brandon L. Weeks, Chris Abell, Trevor Rayment, Sverre Myhra

Research output: Contribution to journalArticle

43 Scopus citations

Abstract

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.

Original languageEnglish
Pages (from-to)113-118
Number of pages6
JournalUltramicroscopy
Volume97
Issue number1-4
DOIs
StatePublished - 2003

Keywords

  • Cantilever
  • Q-factor
  • Resonant frequency and spring constant

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