Annealing of dry etch damage in metallized and bare (-201) Ga2O3

Jiancheng Yang, Fan Ren, Rohit Khanna, Kristen Bevlin, Dwarakanath Geerpuram, Li-Chun Tung, Jingyu Lin, Hongxing Jiang, Jonathan Lee, Elena Flitsiyan, Leonid Chernyak, S. J. Pearton, Akito Kuramata

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)051201
JournalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
StatePublished - Jul 2017

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