Annealing of dry etch damage in metallized and bare (-201) Ga2O3

Jiancheng Yang; Fan Ren; Rohit Khanna; Kristen Bevlin; Dwarakanath Geerpuram; Li-Chun Tung; Jingyu Lin; Hongxing Jiang; Jonathan Lee; Elena Flitsiyan; Leonid Chernyak; S. J. Pearton; Akito Kuramata

Annealing of dry etch damage in metallized and bare (-201) Ga2O3

Jiancheng Yang, Fan Ren, Rohit Khanna, Kristen Bevlin, Dwarakanath Geerpuram, Li-Chun Tung, Jingyu Lin, Hongxing Jiang, Jonathan Lee, Elena Flitsiyan, Leonid Chernyak, S. J. Pearton, Akito Kuramata

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	051201
Journal	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
State	Published - Jul 2017

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@article{185e9a8a3cb44a31960dde0aa3dfba01,

title = "Annealing of dry etch damage in metallized and bare (-201) Ga2O3",

author = "Jiancheng Yang and Fan Ren and Rohit Khanna and Kristen Bevlin and Dwarakanath Geerpuram and Li-Chun Tung and Jingyu Lin and Hongxing Jiang and Jonathan Lee and Elena Flitsiyan and Leonid Chernyak and Pearton, {S. J.} and Akito Kuramata",

year = "2017",

month = jul,

language = "English",

pages = "051201",

journal = "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B",

issn = "1071-1023",

}

TY - JOUR

T1 - Annealing of dry etch damage in metallized and bare (-201) Ga2O3

AU - Yang, Jiancheng

AU - Ren, Fan

AU - Khanna, Rohit

AU - Bevlin, Kristen

AU - Geerpuram, Dwarakanath

AU - Tung, Li-Chun

AU - Lin, Jingyu

AU - Jiang, Hongxing

AU - Lee, Jonathan

AU - Flitsiyan, Elena

AU - Chernyak, Leonid

AU - Pearton, S. J.

AU - Kuramata, Akito

PY - 2017/7

Y1 - 2017/7

M3 - Article

SN - 1071-1023

SP - 051201

JO - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

JF - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

ER -

Annealing of dry etch damage in metallized and bare (-201) Ga2O3

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