A two-stage discrete peristaltic micropump

J. M. Berg, R. Anderson, M. Anaya, B. Lahlouh, M. Holtz, T. Dallas

Research output: Contribution to journalArticlepeer-review

60 Scopus citations


We demonstrate a discrete, two-stage peristaltic micropump for applications in microfluidics. Prototypes are fabricated in polydimethyl-siloxane (PDMS) with water as the working fluid. Off-wafer compressed nitrogen gas provides the actuation energy. The device may be operated in three- or two-stage modes for direct comparison. We show that two-stage pumps have comparable flow rates to the three-stage counterparts, and produce ∼2/3 the static head. Our results suggest that two-stage pumps may be a viable choice under low backpressure conditions where available on-chip area or the number of external connections is limited.

Original languageEnglish
Pages (from-to)6-10
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1
StatePublished - Mar 15 2003


  • Microfabrication
  • Microfluidics
  • Micropumps
  • PDMS
  • Peristaltic


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