TY - JOUR
T1 - A New Profile Measurement Method for Thin Film Surface
AU - Zhang, Hong-Chao
AU - Liu, Shu Jie
AU - Zhang, Yuan L.
N1 - Publisher Copyright:
© Liu et al.
PY - 2014
Y1 - 2014
N2 - In order to measure the surface profile of the thin films in wide area with high accuracy, the research on the new measurement method was conducted and many patents on measurement method and system were researched. Based on the physical properties of soft thin film, the method of using white interferometer and ball cantilevers for measuring the surface profile of thin film is proposed. Then, the multi-ball-cantilever AFM system using a multi-ball-cantilever is developed that had 8 cantilevers in 2 mm and each cantilever had the ball stylus with diameter of 10.9 μm. Using this system, the measurement experiments on the step and transparent material was conducted. The results on the step that the precision of the system’s measuring error is less than 2% and the measuring standard deviation is less than 1 nm. The result on the step indicated that it is possible to measure the surface with high accuracy. The result on the transparent material showed the feasibility for measuring the thin film by this developed system.
AB - In order to measure the surface profile of the thin films in wide area with high accuracy, the research on the new measurement method was conducted and many patents on measurement method and system were researched. Based on the physical properties of soft thin film, the method of using white interferometer and ball cantilevers for measuring the surface profile of thin film is proposed. Then, the multi-ball-cantilever AFM system using a multi-ball-cantilever is developed that had 8 cantilevers in 2 mm and each cantilever had the ball stylus with diameter of 10.9 μm. Using this system, the measurement experiments on the step and transparent material was conducted. The results on the step that the precision of the system’s measuring error is less than 2% and the measuring standard deviation is less than 1 nm. The result on the step indicated that it is possible to measure the surface with high accuracy. The result on the transparent material showed the feasibility for measuring the thin film by this developed system.
KW - Multi-ball cantilever
KW - Surface profile measurement
KW - Thin film
KW - White light interferometer
UR - http://www.scopus.com/inward/record.url?scp=84926620870&partnerID=8YFLogxK
U2 - 10.2174/1874444301406010480
DO - 10.2174/1874444301406010480
M3 - Article
VL - 6
SP - 480
EP - 487
JO - Open Automation and Control Systems Journal
JF - Open Automation and Control Systems Journal
IS - 1
ER -