A new metal-to-metal antifuse with amorphous carbon

S. Liu, D. Lamp, S. Gangopadhyay, G. Sreenivas, S. S. Ang, H. A. Naseem

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

We report the development of a new metal-to-metal antifuse with amorphous carbon as the dielectric. Amorphous carbon antifuses have several characteristics making them superior to amorphous silicon antifuses, including lower values of OFF-state leakage current, ON-state resistance, dielectric constant, and breakdown voltage. Most importantly, amorphous carbon antifuses do not show ON-OFF switching, which is observed in amorphous silicon antifuses. A new model is proposed to explain the breakdown mechanism and ON-state reliability of amorphous carbon antifuses.

Original languageEnglish
Pages (from-to)317-319
Number of pages3
JournalIEEE Electron Device Letters
Volume19
Issue number9
DOIs
StatePublished - Sep 1998

Keywords

  • Amorphous carbon
  • Antifuse
  • FPGA

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