A new metal-to-metal antifuse with amorphous carbon

S. Liu; D. Lamp; S. Gangopadhyay; G. Sreenivas; S. S. Ang; H. A. Naseem

doi:10.1109/55.709626

A new metal-to-metal antifuse with amorphous carbon

S. Liu, D. Lamp, S. Gangopadhyay, G. Sreenivas, S. S. Ang, H. A. Naseem

Physics

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

We report the development of a new metal-to-metal antifuse with amorphous carbon as the dielectric. Amorphous carbon antifuses have several characteristics making them superior to amorphous silicon antifuses, including lower values of OFF-state leakage current, ON-state resistance, dielectric constant, and breakdown voltage. Most importantly, amorphous carbon antifuses do not show ON-OFF switching, which is observed in amorphous silicon antifuses. A new model is proposed to explain the breakdown mechanism and ON-state reliability of amorphous carbon antifuses.

Original language	English
Pages (from-to)	317-319
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	19
Issue number	9
DOIs	https://doi.org/10.1109/55.709626
State	Published - Sep 1998

Keywords

Amorphous carbon
Antifuse
FPGA

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10.1109/55.709626

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abstract = "We report the development of a new metal-to-metal antifuse with amorphous carbon as the dielectric. Amorphous carbon antifuses have several characteristics making them superior to amorphous silicon antifuses, including lower values of OFF-state leakage current, ON-state resistance, dielectric constant, and breakdown voltage. Most importantly, amorphous carbon antifuses do not show ON-OFF switching, which is observed in amorphous silicon antifuses. A new model is proposed to explain the breakdown mechanism and ON-state reliability of amorphous carbon antifuses.",

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AU - Liu, S.

AU - Lamp, D.

AU - Gangopadhyay, S.

AU - Sreenivas, G.

AU - Ang, S. S.

AU - Naseem, H. A.

PY - 1998/9

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N2 - We report the development of a new metal-to-metal antifuse with amorphous carbon as the dielectric. Amorphous carbon antifuses have several characteristics making them superior to amorphous silicon antifuses, including lower values of OFF-state leakage current, ON-state resistance, dielectric constant, and breakdown voltage. Most importantly, amorphous carbon antifuses do not show ON-OFF switching, which is observed in amorphous silicon antifuses. A new model is proposed to explain the breakdown mechanism and ON-state reliability of amorphous carbon antifuses.

AB - We report the development of a new metal-to-metal antifuse with amorphous carbon as the dielectric. Amorphous carbon antifuses have several characteristics making them superior to amorphous silicon antifuses, including lower values of OFF-state leakage current, ON-state resistance, dielectric constant, and breakdown voltage. Most importantly, amorphous carbon antifuses do not show ON-OFF switching, which is observed in amorphous silicon antifuses. A new model is proposed to explain the breakdown mechanism and ON-state reliability of amorphous carbon antifuses.

KW - Amorphous carbon

KW - Antifuse

KW - FPGA

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JF - IEEE Electron Device Letters

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