A low impedance Marx generator was developed as part of a test bed for vacuum diodes of various electrode materials and geometries. The generator supplies sufficient energy to initiate and sustain the typically unwanted plasma formation within the diode; which facilitates the observation of the plasma, current uniformity, and electron current densities of various diode structures. The generator consists of ten stages; each stage utilizes a 220 nF 50 kV capacitor, with a series inductance of ∼20 nH. When charged to the rated voltage of the capacitors the energy density of the complete generator with case, spark gaps, insulation, etc., is 19.2 mJ/cm3; this is roughly the energy density of a typical ceramic doorknob capacitor without any supporting structure or isolation. The energy density of the capacitors utilized in the Marx generator by themselves is 104 mJ/cm3. Fired into a low inductance short, the ringing frequency was measured to be 1.4 MHz resulting in an output impedance of 5.2 Ω. Erection of the Marx required adding forward feeding capacitors as the stray capacitance to ground is smaller than the capacitance (∼60 pF) of the low inductance, low profile spark gap switches. The design and construction of this generator are discussed as well as selected experimental results obtained with the generator.