A correction to the nanoindentation technique for ultrashallow indenting depths

Chang Dong Yeo, Andreas A. Polycarpou

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A correction to the nanoindentation technique taking into account the elastic recovery at extremely shallow contact depths was proposed. Using a high-sensitivity nanoindentation system with a sharp indenting tip, the magnitude of the elastic recovery could be obtained directly from very low-force load-unload curves, which was then used to correct the contact area used for hardness measurements. Nanoindentation experiments were performed on a standard fused quartz sample and, compared to standard nanoindentation techniques, the proposed method was found to be more accurate at ultrashallow indenting depths of <3 nm.

Original languageEnglish
Pages (from-to)2359-2362
Number of pages4
JournalJournal of Materials Research
Volume22
Issue number9
DOIs
StatePublished - Sep 2007

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